Nha VQ, Thang LV, Thuy Linh HT, Gorbachuk NI, Cuong NX. Formation of radiation-disturbed layer in Al/SiO2/n-Si structures irradiated with helium ions with energy 5 MeV. hueuni-jns [Internet]. 2020Aug.5 [cited 2024Dec.22];129(1D):71-5. Available from: https://jos.hueuni.edu.vn/index.php/hujos-ns/article/view/5765